JPS6155264B2 - - Google Patents

Info

Publication number
JPS6155264B2
JPS6155264B2 JP55172047A JP17204780A JPS6155264B2 JP S6155264 B2 JPS6155264 B2 JP S6155264B2 JP 55172047 A JP55172047 A JP 55172047A JP 17204780 A JP17204780 A JP 17204780A JP S6155264 B2 JPS6155264 B2 JP S6155264B2
Authority
JP
Japan
Prior art keywords
pressure
thin
diaphragm
pressure transducer
outer diameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55172047A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5796574A (en
Inventor
Yukio Takahashi
Michitaka Shimazoe
Yoshitaka Matsuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP55172047A priority Critical patent/JPS5796574A/ja
Publication of JPS5796574A publication Critical patent/JPS5796574A/ja
Publication of JPS6155264B2 publication Critical patent/JPS6155264B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP55172047A 1980-12-08 1980-12-08 Semiconductor pressure transducer Granted JPS5796574A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55172047A JPS5796574A (en) 1980-12-08 1980-12-08 Semiconductor pressure transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55172047A JPS5796574A (en) 1980-12-08 1980-12-08 Semiconductor pressure transducer

Publications (2)

Publication Number Publication Date
JPS5796574A JPS5796574A (en) 1982-06-15
JPS6155264B2 true JPS6155264B2 (en]) 1986-11-27

Family

ID=15934544

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55172047A Granted JPS5796574A (en) 1980-12-08 1980-12-08 Semiconductor pressure transducer

Country Status (1)

Country Link
JP (1) JPS5796574A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01107310A (ja) * 1987-10-20 1989-04-25 Matsushita Electric Ind Co Ltd 浮動型磁気ヘッド

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06132545A (ja) * 1992-10-19 1994-05-13 Mitsubishi Electric Corp 圧力検出装置
JP3323032B2 (ja) * 1995-06-07 2002-09-09 三菱電機株式会社 半導体圧力検出装置の設計方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01107310A (ja) * 1987-10-20 1989-04-25 Matsushita Electric Ind Co Ltd 浮動型磁気ヘッド

Also Published As

Publication number Publication date
JPS5796574A (en) 1982-06-15

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